Towards new generation long trace profiler LTP-2020: system design with different sensors in different operation modes

Valeriy V. Yashchuk; Kevan Anderson; Grant D. Cutler; Jeff Dickert; Damon English; Ralf D. Geckeler; Ian Lacey; Peter Z. Takacs

doi:10.1117/12.2677861

3 October 2023 Towards new generation long trace profiler LTP-2020: system design with different sensors in different operation modes

Valeriy V. Yashchuk, Kevan Anderson, Grant D. Cutler, Jeff Dickert, Damon English, Ralf D. Geckeler, Ian Lacey, Peter Z. Takacs

Author Affiliations +

Proceedings Volume 12695, Advances in Metrology for X-Ray and EUV Optics X; 1269505 (2023) https://doi.org/10.1117/12.2677861
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

The thorough realization of the advantages of the new generation x-ray light sources, such as the Upgraded Advanced Light Source (ALS˗U) under construction, requires near-perfect x-ray optics, capable of delivering light without significant degradation of brightness and coherence. The stringent requirements of beamline optics drive the state of the art in ex situ optical metrology. Here, we present the results of the ongoing efforts at the ALS X-Ray Optics Laboratory to develop a new generation long trace profiler, LTP-2020. We discuss the system design that incorporates different types of surface slope sensors. In addition to the classical pencil beam interferometry (PBI) sensor with an improved optical design, we develop a deflectometry sensor based on a customized electronic autocollimator (AC). By applying a new data processing algorithm to the AC raw image data available from the customized AC, we significantly reduce the quasi-periodic systematic error of the AC equipped with a small size aperture. We also treat the possibility to use the AC as a PBI sensor with external light beam sources based on super-luminescent emitting diode (SLED) and single-mode laser diode (SMLD). Operation modes with stationary and/or translated sensors are possible due to the two-carriage gantry system with adjustable vertical position. The variety of the available operation modes allows optimization of the LTP-2020 experimental arrangement for providing the best possible performance in measurements with state-of-the-art aspherical x-ray optics, variable-line-spacing diffraction gratings, and multi-element optical systems.

Conference Presentation

Citation Download Citation

Valeriy V. Yashchuk, Kevan Anderson, Grant D. Cutler, Jeff Dickert, Damon English, Ralf D. Geckeler, Ian Lacey, and Peter Z. Takacs "Towards new generation long trace profiler LTP-2020: system design with different sensors in different operation modes", Proc. SPIE 12695, Advances in Metrology for X-Ray and EUV Optics X, 1269505 (3 October 2023); https://doi.org/10.1117/12.2677861

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available