High sensitivity terahertz metamaterial biosensor based on multilayer SiO2-Ag

Harry Miyosi Silalahi; Yu-Zhih Chiang; Wei-Fan Chiang; Chia-Yi Huang

doi:10.1117/12.2691153

11 March 2024 High sensitivity terahertz metamaterial biosensor based on multilayer SiO₂-Ag

Harry Miyosi Silalahi, Yu-Zhih Chiang, Wei-Fan Chiang, Chia-Yi Huang

Proceedings Volume 12885, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVII; 128850F (2024) https://doi.org/10.1117/12.2691153
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

A simple method compatible with all geometrical structures of terahertz metamaterials for enhancing the tunability, sensitivity, Q-factor, and figure of merit (FOM) is proposed. This method uses a multi-layer SiO₂:Ag to approach the floating-like double split ring resonators. The terahertz metamaterial consists of five layers of SiO₂:Ag, in which each layer of SiO₂:Ag comprises a 250-nm-thick SiO₂ layer and a 50-nm-thick Ag layer. The tunability, sensitivity, Q-factor, and figure of merit (FOM) of metamaterial can be increased with increasing the number of layers of SiO₂:Ag. Metamaterial with multi-layer SiO₂-Ag has a larger tunability, sensitivity, Q-factor, and figure of merit (FOM) than the common metamaterial based on a single metal layer. The multi-layer metamaterial is an excellent achievement in developing biomolecule biosensors and can potentially sense dangerous viruses.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Harry Miyosi Silalahi, Yu-Zhih Chiang, Wei-Fan Chiang, and Chia-Yi Huang "High sensitivity terahertz metamaterial biosensor based on multilayer SiO₂-Ag", Proc. SPIE 12885, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVII, 128850F (11 March 2024); https://doi.org/10.1117/12.2691153

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