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Within the upcoming PIC platform, we have designed, fabricated, and examined various ring resonators, comprised of coupling structures, waveguides and ring resonators, tailored for the optical L-band (1565 nm – 1625 nm). The arrangement of the coupling structures for incoupling the light from a laser source and outcoupling of the light to a detector allows for automatic probing and mapping of various structure modifications. With grating couplers integrated on the chip, these optical structures can be linked to a tunable laser source and a detector via optical fibers. We compare the fabrication results of the optical nanostructures for the AlN-based devices with previous results from Si3N4-based structures. To ensure the ideal structure dimensions and to minimize deviations from the simulated design values, the AlN dry etch process has been investigated and improved. |
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