Spectral optimization and influence of noise for spectrometer free areal chromatic confocal metrology

Jonas Lochbrunner; Korbinian Prause; Johannes Büttner; Michael Layh

doi:10.1117/12.3000435

11 March 2024 Spectral optimization and influence of noise for spectrometer free areal chromatic confocal metrology

Jonas Lochbrunner, Korbinian Prause, Johannes Büttner, Michael Layh

Proceedings Volume 12893, Photonic Instrumentation Engineering XI; 128930Y (2024) https://doi.org/10.1117/12.3000435
Event: SPIE OPTO, 2024, San Francisco, California, United States

Conference Poster

Abstract

The spectrometer-free chromatic confocal measurement technique enables 3D surface measurements with just one exposure and without scanning. To reduce the need for a spectrometer for the spectral analysis of the reflected light composition and thus the extraction of the local surface height, an optical spectral analysis unit is used. This unit determines the first momentum of the spectral composition reflected from the surface under probe for a large number of lateral measurement points simultaneously. This work investigates the impact of the spectral composition and light power of the light source on the sensitivity and accuracy of this method. A thorough optimization of the light source will be conducted, demonstrating the impact of various spectral compositions and light source power on the system performance, taking into account the system-related etendue. In addition, the optimization of the spectral transmission filter used in the optical spectral analysis unit and its influence on the accuracy and sensitivity of the system over the entire measurement range is shown.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Jonas Lochbrunner, Korbinian Prause, Johannes Büttner, and Michael Layh "Spectral optimization and influence of noise for spectrometer free areal chromatic confocal metrology", Proc. SPIE 12893, Photonic Instrumentation Engineering XI, 128930Y (11 March 2024); https://doi.org/10.1117/12.3000435

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