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8 February 2024 LNOI/Si3N4 heterogeneous integrated high-Q tunable microdisk resonator chip
Haibo Li, Guang Qian, Xiaowen Gu, Kunjie Ma, Chenquan Wang, Yu Sun, Tangsheng Chen
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Proceedings Volume 13066, International Conference on Optoelectronic Materials and Devices (ICOMD 2023); 1306610 (2024) https://doi.org/10.1117/12.3025235
Event: 2023 International Conference on Optoelectronic Materials and Devices (COMD 2023), 2023, Chongqing, China
Abstract
In this paper, we demonstrate a high-Q LNOI microdisk coupling with a silicon nitride (Si3N4) optical waveguide. Its resonance characteristic can be turned by a thermistor on the microdisk resonator. The LNOI microdisk resonator is fabricated by inductively coupled plasma-reactive ion etching (ICP-RIE). Its sidewall is further smoothed by employing chemical mechanical polishing (CMP) to improve the quality factor (Q-factor). The LNOI/Si3N4 heterogeneous integrated resonator shows a Q-factor of 2.58 × 105, and a wavelength tunability of ~14.5 pm/W.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Haibo Li, Guang Qian, Xiaowen Gu, Kunjie Ma, Chenquan Wang, Yu Sun, and Tangsheng Chen "LNOI/Si3N4 heterogeneous integrated high-Q tunable microdisk resonator chip", Proc. SPIE 13066, International Conference on Optoelectronic Materials and Devices (ICOMD 2023), 1306610 (8 February 2024); https://doi.org/10.1117/12.3025235
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KEYWORDS
Resonators
Microresonators
Optical resonators
Waveguides
Etching
Lithium niobate
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