Three-dimensional topography measurement of microsurface based on FBG probe scanning

Fangfang Liu; Long Ling; Biao Jin; Xinyang Liu; Heyin Zhou; Shizhao Li; Hongli Li; Haojie Xia

doi:10.1117/12.3032669

13 September 2024 Three-dimensional topography measurement of microsurface based on FBG probe scanning

Fangfang Liu, Long Ling, Biao Jin, Xinyang Liu, Heyin Zhou, Shizhao Li, Hongli Li, Haojie Xia

Proceedings Volume 13178, Eleventh International Symposium on Precision Mechanical Measurements; 131781A (2024) https://doi.org/10.1117/12.3032669
Event: Eleventh International Symposium on Precision Mechanical Measurements, 2023, Guangzhou, China

Abstract

In order to achieve the measurement of three-dimensional (3D) surface topography of microdevices, this study uses high-sensitivity fiber Bragg grating (FBG) as the sensitive element of the contact measurement probe system and studies the device surface microtopography scanning measurement system based on FBG probe, which is used for the measurement and characterization of micrometer-sized microdevices, with high measurement resolution and low cost. In this study, a low-priced micro-displacement output strategy combining macro- and micro-motion was adopted, and an improved image horizontal distortion correction algorithm was proposed to correct the horizontal distortion of the image. Through the performance experiments of the measurement system, a micro-displacement measurement sensitivity of 12.21 mV/nm and a measurement resolution of 0.46 nm are obtained. The measurement results of bar structure step standard specimens show that the system can distinguish the step height of 200 nm by contact scanning measurement, solve the problem of horizontal distortion in the global distribution of the image, and realize the 3D measurement and characterization of micron-scale surface topography.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Fangfang Liu, Long Ling, Biao Jin, Xinyang Liu, Heyin Zhou, Shizhao Li, Hongli Li, and Haojie Xia "Three-dimensional topography measurement of microsurface based on FBG probe scanning", Proc. SPIE 13178, Eleventh International Symposium on Precision Mechanical Measurements, 131781A (13 September 2024); https://doi.org/10.1117/12.3032669

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KEYWORDS

Distortion

Fiber Bragg gratings

3D metrology

Image processing

Signal processing

Edge detection

3D image processing

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