A technique for achieving stable preparation of anisotropic oxide aperture VCSELs

Lishan Fu; Ning Cui; Feng Zhang; Baolu Guan

doi:10.1117/12.3035992

8 November 2024 A technique for achieving stable preparation of anisotropic oxide aperture VCSELs

Lishan Fu, Ning Cui, Feng Zhang, Baolu Guan

Proceedings Volume 13233, Semiconductor Lasers and Applications XIV; 1323312 (2024) https://doi.org/10.1117/12.3035992
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China

Conference Poster

Abstract

High-temperature operating characteristics and polarization stability are important for VCSEL as an atomic clock light source. In this study, the polarization-stable single-mode 795 nm VCSEL with anisotropic aperture was successful fabricated by controlled the asymmetric airflow distribution and the different oxidation rates of the crystal direction. The oxidation of different crystal direction of asymmetric oxidation aperture with time is summarized. The surface electric fields of the traditional circular oxidation aperture VCSEL(C-VCSEL) and diamond shape oxidation aperture VCSEL(D-VCSEL) with different aperture sizes are investigated by simulation, and then the cause of the anisotropy of D-VCSEL is explored. The special anisotropic oxidation aperture of the device makes it have stable polarized characteristics. The demonstrated D-VCSEL with dimensions of 3.6 μm × 4.8 μm, achieving an orthogonal polarization suppression ratio (OPSR) exceeding 30 dB while maintaining low threshold and high single-mode output even at temperatures up to 80 °C.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Lishan Fu, Ning Cui, Feng Zhang, and Baolu Guan "A technique for achieving stable preparation of anisotropic oxide aperture VCSELs", Proc. SPIE 13233, Semiconductor Lasers and Applications XIV, 1323312 (8 November 2024); https://doi.org/10.1117/12.3035992

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available