Paper
1 December 1990 Source emission-pattern polynomial representation
Ricardo Flores-Hernandez, Francisco De Villa
Author Affiliations +
Abstract
A method to obtain accurate thickness data to characterize the emission patterns of evaporation sources is described. Thickness data is obtained through digital image processing algorithms applied to the monochromatic transmission bands digitized from a set of multilayer Fabry-Perot filters deposited on large flat circular substrates. These computer image-processed taper-thickness patterns are reduced to orthonormal polynomial series expansions in two steps, using Tschebyshev and associated Legendre polynomials. The circular glass substrates employed to characterize each type of evaporation source are kept stationary during the evaporation process of evaporation of each layer to obtain the specific thickness distribution for each type of source.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ricardo Flores-Hernandez and Francisco De Villa "Source emission-pattern polynomial representation", Proc. SPIE 1324, Modeling of Optical Thin Films II, (1 December 1990); https://doi.org/10.1117/12.22415
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KEYWORDS
Image enhancement

Fiber optic illuminators

Image processing

Thin films

Cameras

Image filtering

Image transmission

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