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Shenzhen Superconducting Soft x-ray Free Electron Laser (S3FEL) will use advanced superconducting accelerators to provide the soft x-ray light source with high repetition rate, high brightness and ultrashort pulse. To isolate and protect the accelerator ultravacuum system, the beam window is required between the accelerator and the dump. This study used the finite element analysis method to perform thermal structure calculation based on previously studied about water-cooled beryllium window. The advantages of beryllium in different beam window materials are obtained. By analyzing the influence of different beryllium window structures on stress and temperature, we concluded that the beryllium window with smaller effective diameter and curvature radius had better effect. In addition, the safety of the beryllium window operation was analyzed. We concluded that the beryllium window can operate safely when the beam eccentricity distance was not more than 25mm, the beam reduction ratio was within 20%, and the heat transfer coefficient was not less than 2000 W/(m2·K). The study clarifies the safety threshold of beryllium window operation and shows that the beryllium window can well meet the requirements, which will provide a critical theoretical basis for the design of dump beam window in S3FEL.
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