Microstructures and domain size effects in diamond films characterized by Raman spectroscopy

Robert J. Nemanich; Larry Bergman; Yvonne M. LeGrice; Kevin Turner; T. P. Humphreys

doi:10.1117/12.45125

1 April 1991 Microstructures and domain size effects in diamond films characterized by Raman spectroscopy

Robert J. Nemanich, Larry Bergman, Yvonne M. LeGrice, Kevin Turner, T. P. Humphreys

Proceedings Volume 1437, Applied Spectroscopy in Material Science; (1991) https://doi.org/10.1117/12.45125
Event: Optics, Electro-Optics, and Laser Applications in Science and Engineering, 1991, Los Angeles, CA, United States

Abstract

The issues related to Raman scattering characterization of the microstructure of diamond thin films are reviewed. The optical effects of the transparent/absorbing composite of sp2/sp3 bonded material is discussed. Then the dependence of the Raman spectra on the microcrystalline size is described. The comparison is made with crystalline Si, and the analysis is applied to a series a diamond films. Lastly micro-Raman scattering from the initial stages of diamond film growth are described, and the results are correlated with STM measurements of the nuclei. Surface enhanced Raman scattering is applied to examine the regions between diamond nuclei.

Citation Download Citation

Robert J. Nemanich, Larry Bergman, Yvonne M. LeGrice, Kevin Turner, and T. P. Humphreys "Microstructures and domain size effects in diamond films characterized by Raman spectroscopy", Proc. SPIE 1437, Applied Spectroscopy in Material Science, (1 April 1991); https://doi.org/10.1117/12.45125

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