Determination of optical constants of thin film in the soft x-ray region

Yong Hong Guo; Zhengxiu Fan; Ouyang Bin; Lei Jin; Jian-Da Shao

doi:10.1117/12.47246

1 November 1991 Determination of optical constants of thin film in the soft x-ray region

Yong Hong Guo, Zhengxiu Fan, Ouyang Bin, Lei Jin, Jian-Da Shao

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47246
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

We presented a method of determining optical constants of a thin film using the reflectance R(theta) curve. Other parameters of the film, such as film thickness and roughness, are also determined with the derivation of the optical constants(n,k). To illustrate the method, the results of the film Al are given.

Citation Download Citation

Yong Hong Guo, Zhengxiu Fan, Ouyang Bin, Lei Jin, and Jian-Da Shao "Determination of optical constants of thin film in the soft x-ray region", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47246

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