Epitaxial liftoff technology

E. Yablonovitch

doi:10.1117/12.2321749

1 December 1991 Epitaxial liftoff technology

E. Yablonovitch

Proceedings Volume 1563, Optical Enhancements to Computing Technology; (1991) https://doi.org/10.1117/12.2321749
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Epitaxial liftoff permits the integration of III-V films and devices onto arbitrary material substrates. This paper will review Bellcore's work on opto-electronic integration of III-V optical transmitter and receiver devices onto LiNbO3, glass, Silicon and sapphire substrates.

Citation Download Citation

E. Yablonovitch "Epitaxial liftoff technology", Proc. SPIE 1563, Optical Enhancements to Computing Technology, (1 December 1991); https://doi.org/10.1117/12.2321749

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