FTIR spectrometric investigation of tin-doped indium oxide coatings on quartz glasses

R. Kalaehne; K. Bolick; K.-D. Schleinitz; M. Rottmann; Karl Heinz Heckner; P. Klobes

doi:10.1117/12.56482

1 March 1992 FTIR spectrometric investigation of tin-doped indium oxide coatings on quartz glasses

R. Kalaehne, K. Bolick, K.-D. Schleinitz, M. Rottmann, Karl Heinz Heckner, P. Klobes

Proceedings Volume 1575, 8th Intl Conf on Fourier Transform Spectroscopy; (1992) https://doi.org/10.1117/12.56482
Event: Eighth International Conference on Fourier Transform Spectroscopy, 1991, Lubeck-Travemunde, Germany

Abstract

FTIR spectra of tin-doped indium oxide (ITO) coatings on quartz substrates are interpreted by fitting model functions. ITO coatings are prepared by dc sputtering. The sputter gases contain O2, Ar, and CF4, CCl2F2 and CBr2F2, respectively. The measured thickness d of deposited ITO coatings on quartz glass substrates differs between 40 and 540 nm. Carrier concentration and mobility are estimated.

Citation Download Citation

R. Kalaehne, K. Bolick, K.-D. Schleinitz, M. Rottmann, Karl Heinz Heckner, and P. Klobes "FTIR spectrometric investigation of tin-doped indium oxide coatings on quartz glasses", Proc. SPIE 1575, 8th Intl Conf on Fourier Transform Spectroscopy, (1 March 1992); https://doi.org/10.1117/12.56482

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