Paper
1 March 1992 Transmission, emission, and specular-reflection FTIR spectra of the thin forsterite (MG2SiO4) film
Miroslaw Handke, Anna Stoch, Witold Jastrzebski
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Proceedings Volume 1575, 8th Intl Conf on Fourier Transform Spectroscopy; (1992) https://doi.org/10.1117/12.56455
Event: Eighth International Conference on Fourier Transform Spectroscopy, 1991, Lubeck-Travemunde, Germany
Abstract
The forsterite ceramics is a promising material for electric and engineering applications because of its low dielectric loss and low thermal expansion coefficient. The aim of this work is to characterize the thin films of forsterite deposited on steel sheet and silicon wafer by means of FT-IR spectroscopy. In the case of thin films on a flat solid surface the most useful IR measurement technique is specular reflection. However, as it was reported in many papers, these spectra may differ drastically from the transmission spectra. Therefore, the second aim of this work is the comparison between forsterite films's spectra recorded with different sampling techniques including specular reflection, transmission and emission.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Miroslaw Handke, Anna Stoch, and Witold Jastrzebski "Transmission, emission, and specular-reflection FTIR spectra of the thin forsterite (MG2SiO4) film", Proc. SPIE 1575, 8th Intl Conf on Fourier Transform Spectroscopy, (1 March 1992); https://doi.org/10.1117/12.56455
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KEYWORDS
Silicon films

Silicon

Thin films

FT-IR spectroscopy

Specular reflections

Semiconducting wafers

Ceramics

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