Ultrasensitive detection of trace gases with diode lasers by frequency modulation spectroscopy

David E. Cooper

doi:10.1117/12.59288

14 May 1992 Ultrasensitive detection of trace gases with diode lasers by frequency modulation spectroscopy

David E. Cooper

Proceedings Volume 1636, Applied Spectroscopy in Materials Science II; (1992) https://doi.org/10.1117/12.59288
Event: OE/LASE '92, 1992, Los Angeles, CA, United States

Abstract

Frequency modulation spectroscopy (FMS) with mid- and near-infrared tunable diode lasers is an attractive approach for a number of applications that require ultrasensitive detection of trace gases. The technique combines high detection sensitivity with high detection speed and is capable of detecting numerous small molecular weight compounds at levels ranging from low parts-per-million (ppm) to sub-parts-per-billion (ppb). We will review the principles of FMS and discuss its application in areas relevant to materials processing.

Citation Download Citation

David E. Cooper "Ultrasensitive detection of trace gases with diode lasers by frequency modulation spectroscopy", Proc. SPIE 1636, Applied Spectroscopy in Materials Science II, (14 May 1992); https://doi.org/10.1117/12.59288

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