Shape effects of edge-line phase shifter on light intensity contrast

Mitsunori Nakatani; Hirofumi Nakano; Haruhiko Kusunose; Kazuya Kamon; Shuichi Matsuda; Yaichiro Watakabe; Hirozo Takano; Mutuyuki Otsubo

doi:10.1117/12.130350

1 June 1992 Shape effects of edge-line phase shifter on light intensity contrast

Mitsunori Nakatani, Hirofumi Nakano, Haruhiko Kusunose, Kazuya Kamon, Shuichi Matsuda, Yaichiro Watakabe, Hirozo Takano, Mutuyuki Otsubo

Author Affiliations +

Proceedings Volume 1674, Optical/Laser Microlithography V; (1992) https://doi.org/10.1117/12.130350
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

By using two-dimensional simulation, dependence of light intensity contrast on numerical aperture (NA), coherence factor (a) of i-line stepper, shifter-width, phase error and slope angle of phase shifter edges have been investigated. For the slope angle of 90° and the shifter phase of 180°, the highest contrast is obtained for NA=0.65 and a=0.3. As the slope angle becomes to be small, contrast degrades remarkably for high NA(=0.65). On these simulation, 0.18pm resolution limit of isolated space pattern is successfully realized using an image reversal resist process.

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Mitsunori Nakatani, Hirofumi Nakano, Haruhiko Kusunose, Kazuya Kamon, Shuichi Matsuda, Yaichiro Watakabe, Hirozo Takano, and Mutuyuki Otsubo "Shape effects of edge-line phase shifter on light intensity contrast", Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); https://doi.org/10.1117/12.130350

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