Advanced matrix-based algorithm for ion-beam milling of optical components

Charles L. Carnal; Charles M. Egert; Kathy W. Hylton

doi:10.1117/12.130719

10 December 1992 Advanced matrix-based algorithm for ion-beam milling of optical components

Charles L. Carnal, Charles M. Egert, Kathy W. Hylton

Proceedings Volume 1752, Current Developments in Optical Design and Optical Engineering II; (1992) https://doi.org/10.1117/12.130719
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Control of an ion beam for milling optical surfaces is a nontrivial problem in two-dimensional deconvolution. The ion milling operation is performed by moving an ion beam gun through a grid of points over the surface of an optical workpiece. The control problem is to determine the amount of time to dwell at each point in the grid to obtain a desired surface profile. This research treats the problem in linear algebra terms. The required dwell times are the solutions to a large, sparse system of linear equations. Traditional factorization methods such as Gaussian elimination cannot be used because the linear equations are severely ill conditioned. Theoretically, a least-squares solution to this problem exists. Practical approaches to finding a minimal least-squares solution are discussed.

Citation Download Citation

Charles L. Carnal, Charles M. Egert, and Kathy W. Hylton "Advanced matrix-based algorithm for ion-beam milling of optical components", Proc. SPIE 1752, Current Developments in Optical Design and Optical Engineering II, (10 December 1992); https://doi.org/10.1117/12.130719

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