PROCEEDINGS VOLUME 1809
PHOTOMASK TECHNOLOGY | 23-25 SEPTEMBER 1992
12th Annual BACUS Symposium on Photomask Technology and Management
Editor(s): Scott Landstrom, Richard LaFrance
Editor Affiliations +
IN THIS VOLUME

7 Sessions, 26 Papers, 0 Presentations, 0 Posters
PHOTOMASK TECHNOLOGY
23-25 September 1992
Sunnyville, CA, United States
Advanced Lithography
C. Edward Franks, Asao Shikata, Catherine A. Baker
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142129
Tadashi Komagata, Hitoshi Takemura, Nobou Goto, Ron Espeseth, Michael Hassel Shearer
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142137
D. C. Fowlis, Darryl Peters, C. M. Rose, A. R. von Neida, Herbert A. Waggener, William P. Wilson
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142146
Gerry Owen, Roger Fabian W. Pease, Nadim I. Maluf, Robert L. Hsieh, Jun Ye, C. Neil Berglund
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142149
Advanced Process Technology
Masa-aki Kurihara, Masumi Arai, Hiroshi Fujita, Hisashi Moro-oka, Yoichi Takahashi, Hisatake Sano
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142150
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142151
Anthony E. Novembre, Regine G. Tarascon, Larry F. Thompson, Wallace T. Tang, C. Otis Tange, R. A. Bostic, D. H. Ahn
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142152
Warren W. Flack, Ken E. Tokunaga, Kenneth D. Edwards
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142153
Advanced Metrology
Bert F. Plambeck, Scott Landstrom, Barry Rockwell
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142154
An Tran, Christine K. Clevenger
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142130
Mark Allen Neil, Robert J. Monteverde, Stephen D. Kirkish
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142131
Derek B. Dove, T. C. Chieu, Amalkumar P. Ghosh
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142132
Pelliclization and Cleaning
Susan V. Daugherty
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142133
Robert W. Murphy, David S. Flesberg, Terrence W.O. Reilly, James A. Reynolds
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142134
Mimi L. Koehler
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142135
Inspection and Repair
Kevin D. Lucas, Andrzej J. Strojwas
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142136
James K. Tison, John M. O'Connor
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142138
Rosanne LaVoy
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142139
Steven C. Nash, James P. Levin, O. De Hodgins
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142140
Quality and Business
Patrick Reilly
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142141
J. P. Miller
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142142
Phase-Shifting Masks
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142143
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142144
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142145
Susan M. Wilson, Gary A. Peterson Jr., S. Sohail H. Naqvi, John Robert McNeil
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142147
Frank E. Abboud, Jorge L. Freyer, Andrew J. Muray, Robert J. Naber, John T. Poreda, John R. Thomas
Proceedings Volume 12th Annual BACUS Symposium on Photomask Technology and Management, (1993) https://doi.org/10.1117/12.142148
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