Measurement of surface roughness of optical disk substrates by differential polarization interferometry

Wendong Xu; Xishan Li

doi:10.1117/12.150655

13 August 1993 Measurement of surface roughness of optical disk substrates by differential polarization interferometry

Wendong Xu, Xishan Li

Proceedings Volume 2053, Optical Storage (ISOS '92); (1993) https://doi.org/10.1117/12.150655
Event: Optical Storage: Third International Symposium, 1992, Kunming, Yunnan Province, China

Abstract

This paper proposes a new interferometer to measure the roughness of optical disk substrates, which applies the principle of shearing interferometry and uses a Faraday modulator to detect the phase between two polarized beams. The instrument can produce surface probe and other statistical data with a height sensitivity of 2 nm and a lateral resolution of 1.2 micrometers . It has excellent stability even under vibration conditions, and rapid and noncontact measurements can be made without a special reference surface.

Citation Download Citation

Wendong Xu and Xishan Li "Measurement of surface roughness of optical disk substrates by differential polarization interferometry", Proc. SPIE 2053, Optical Storage (ISOS '92), (13 August 1993); https://doi.org/10.1117/12.150655

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available