Paper
31 January 1994 Industrial applications of FTIR spectroscopy
Hideyuki Ishida
Author Affiliations +
Proceedings Volume 2089, 9th International Conference on Fourier Transform Spectroscopy; (1994) https://doi.org/10.1117/12.166789
Event: Fourier Transform Spectroscopy: Ninth International Conference, 1993, Calgary, Canada
Abstract
The position and advantages of FT-IR among other analytical techniques are discussed, especially in the surface and microanalyses. Two typical examples of FT-IR applications being done recently in our laboratories are presented. Molecular orientation and surface morphology of mechanically rubbed polyimide films used for the alignment layer of liquid crystal display have been extensively studied by FT-IR, ellipsometry and atomic force microscope (AFM). Molecular orientation of rubbed polyimide films tends to saturate with increasing the rubbing density, while the surface roughness is proportional to the rubbing density. A good relationship has been found between IR dichroic ratios and pretilt angle of liquid crystal molecules. Kinetic behavior of a fast photochemical reaction of quinone diazide-type photoresist has been followed directly by a rapid-scan FT-IR.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hideyuki Ishida "Industrial applications of FTIR spectroscopy", Proc. SPIE 2089, 9th International Conference on Fourier Transform Spectroscopy, (31 January 1994); https://doi.org/10.1117/12.166789
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KEYWORDS
FT-IR spectroscopy

Photoresist materials

Chemical analysis

Absorption

Infrared radiation

Molecules

Spectroscopy

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