Integration of polymer electro-optic devices on nonplanar silicon-integrated circuits

Srinath Kalluri; Antao Chen; Vadim Chuyanov; Mehrdad Ziari; William H. Steier; Larry Raymond Dalton

doi:10.1117/12.222809

5 October 1995 Integration of polymer electro-optic devices on nonplanar silicon-integrated circuits

Srinath Kalluri, Antao Chen, Vadim Chuyanov, Mehrdad Ziari, William H. Steier, Larry Raymond Dalton

Proceedings Volume 2527, Nonlinear Optical Properties of Organic Materials VIII; (1995) https://doi.org/10.1117/12.222809
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

To demonstrate the feasibility of integrating polymer electro-optic devices on Si circuitry, we have vertically integrated a demonstration slab phase modulator on nonplanar VLSI circuitry. Optical loss measurements for waveguides fabricated on planarized circuits demonstrate that more practical devices like channel phase and Mach-Zehnder amplitude modulators can easily be integrated onto the circuits.

Citation Download Citation

Srinath Kalluri, Antao Chen, Vadim Chuyanov, Mehrdad Ziari, William H. Steier, and Larry Raymond Dalton "Integration of polymer electro-optic devices on nonplanar silicon-integrated circuits", Proc. SPIE 2527, Nonlinear Optical Properties of Organic Materials VIII, (5 October 1995); https://doi.org/10.1117/12.222809

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