PROCEEDINGS VOLUME 2636
MICROELECTRONIC MANUFACTURING '95 | 25-27 OCTOBER 1995
Microelectronic Device and Multilevel Interconnection Technology
Editor(s): Ih-Chin Chen, Girish A. Dixit, Trung Tri Doan, Nobuo Sasaki
Editor Affiliations +
IN THIS VOLUME

7 Sessions, 33 Papers, 0 Presentations, 0 Posters
Section  (10)
MICROELECTRONIC MANUFACTURING '95
25-27 October 1995
Austin, TX, United States
Advanced Device Technologies
Tadahiro Ohmi
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221121
Mark I. Gardner, Daniel Kadoch
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221131
Dirk Uffmann, Jens Stemmer, Hans-Ulrich Schroeder, Joerg Ackermann, Jochen Aderhold
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221140
Lakshmanna Vishnubhotla, Jamin Michael Ling, Jimmy Huang, Yujen Wu, Greg Smith, Mehdi Zamanian, Fu-Tai Liou, Kaihan A. Ashtiani, M. D. Mc Nicholas
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221148
Deep Submicron Devices I
Kazuya Masu, Michio Yokoyama, Kazuo Tsubouchi
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221149
Toshihiro Sugii, Tetsu Tanaka, Hiroshi Horie, Kunihiro Suzuki
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221150
David Burnett, Shih-Wei Sun
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221151
Iulian Gradinariu, Christian Gontrand
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221152
Mahalingam Nandakumar, Mark Rodder, Ih-Chin Chen
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221153
Deep Submicron Devices II
Jeong Yeol Choi, Chung Jen Chien, Chung Chyung Han, Chuen-Der Lien
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221122
Amitava Chatterjee, Mark Rodder, Ih-Chin Chen
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221123
Mikhail G. Kuznetsov, Alexander A. Kokin, Sergey A. Kokin
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221124
Memory and Silicide Technologies
Keiichiro Kashihara, Tomonori Okudaira, Yoshikazu Tsunemine, Yoshikazu Ohno, Hiromi Itoh, Tadashi Nishimura, Makoto Hirayama, Tsuyoshi Horikawa, Teruo Shibano, et al.
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221125
Martin Duncan, P. Pansana
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221126
Yunlong Sun, Richard S. Harris, Edward J. Swenson, Craig Hutchens
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221127
Chung Jen Chien, Jeong Yeol Choi, Guo-Qiang Lo, Chuen-Der Lien
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221128
Victor M. Ivkin, Valentin V. Baranov
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221129
Advanced Thin Dielectrics
Jack C. Lee, Anthony I. Chou, Kafai Lai, Kiran Kumar
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221130
L. K. Han, Dim-Lee Kwong
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221132
Hai-Hong Wang, L. K. Han, Jason Yan, Dim-Lee Kwong
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221133
L. K. Han, Hai-Hong Wang, Jason Yan, Jin-ha Kim, G. W. Yoon, Dim-Lee Kwong
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221134
Advanced Device Technologies
Sudhir K. Madan, Tom Holloway
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221135
Section
Yu-Hua Lee, Bing-Yue Tsui
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221136
Kevin C. Brown, Rodney Hill, Krishna Reddy, Kamesh Gadepally
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221137
Jaegab Lee, Jaeho Kim, Choogsoo Chi, Sangjoon Park, Kyung-Il Lee, Jaejeong Kim
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221138
Seema Vinayak, B. K. Sehgal, G. Sai Sarvanan, Sindhu Dayal, D. S. Rawal, Akshay A. Naik, R. Gulati, I. Chandra
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221139
Simon Y. M. Chooi, Fang Hong Gn, Lap Hung Chan
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221141
Adriana E. Hass Bar-Ilan, N. Gutmann
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221142
Y. C. Huang, Marx Huang, Sen-Fu Chen, C. H. Yu, L. M. Liu, M. S. Lin
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221143
L. K. Han, D. Allman, Dim-Lee Kwong
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221144
Syun-Ming Jang, Yu-Min Lin, Peter Lee, L. M. Liu, C. H. Yu, Tan Fu Lei, M. S. Lin
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221145
Bibiche Geuskens, Kenneth Rose
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221146
Plenary Session
Fu-Tai Liou
Proceedings Volume Microelectronic Device and Multilevel Interconnection Technology, (1995) https://doi.org/10.1117/12.221147
Back to Top