Practical automatic feedback system for polyphoto CD control

Jeng-Hong Chen; C. Y. Wang

doi:10.1117/12.250907

13 September 1996 Practical automatic feedback system for polyphoto CD control

Jeng-Hong Chen, C. Y. Wang

Proceedings Volume 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II; (1996) https://doi.org/10.1117/12.250907
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

A practical automatic feedback system of exposure energy is proposed to improve the polygate photo critical dimension (CD) control. By the curve of (Delta) (CD) versus (Delta) (exposure energy), we can give the right exposure energy to the current lot by the preceding 5 (or 3) lots' CD, measured by CD SEM. To be easily used, the curve is approached as a linear function. Two months experiment of exposure energy feedback system is carried out on actual 0.5 micrometer i- line SRAM process. The capability index (C_pk) of polygate photo CD has been dramatically improved.

Citation Download Citation

Jeng-Hong Chen and C. Y. Wang "Practical automatic feedback system for polyphoto CD control", Proc. SPIE 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (13 September 1996); https://doi.org/10.1117/12.250907

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