Dimensional variation and roughness of LIGA fabricated microstructures

Charles M. Egert; Robert L. Wood; Chantal G. Khan Malek

doi:10.1117/12.250953

13 September 1996 Dimensional variation and roughness of LIGA-fabricated microstructures

Charles M. Egert, Robert L. Wood, Chantal G. Khan Malek

Proceedings Volume 2880, Microlithography and Metrology in Micromachining II; (1996) https://doi.org/10.1117/12.250953
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

We have measured the dimensional variation and sidewall roughness of features on PMMA microcomponents fabricated by deep x-ray lithography in order to assess the effect of dimensional variation on subsequent assembly operations. Dimensional measurements were made using a stylus profilometer with a repeatability in step height of better than 0.01 micrometers . Roughness measurements were made with the same profilometer scanning in a direction perpendicular to the length of the parts. 22 micrometers and 54 micrometers features exhibited dimensional variations described by a Gaussian distribution with standard deviations of 0.202 micrometers and 0.381 micrometers , respectively. This corresponds to a maximum relative variation of between 0.6% and 0.9%. Sidewall roughnesses were found to be in the range of 0.02 micrometers to 0.03 micrometers , an insignificant contribution to the total variation when compared to overall dimensional variation. Several potential sources of this variation are discussed, but no single cause was identified as the source of the significant dimensional variation observed here.

Citation Download Citation

Charles M. Egert, Robert L. Wood, and Chantal G. Khan Malek "Dimensional variation and roughness of LIGA-fabricated microstructures", Proc. SPIE 2880, Microlithography and Metrology in Micromachining II, (13 September 1996); https://doi.org/10.1117/12.250953

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