High Tc superconducting microbolometer detector arrays

Zhihong Mai; Xinjian Yi; Xing-Rong Zhao; Fang Qiao Zhou; Luqin Liu

doi:10.1117/12.252094

25 September 1996 High Tc superconducting microbolometer detector arrays

Zhihong Mai, Xinjian Yi, Xing-Rong Zhao, Fang Qiao Zhou, Luqin Liu

Proceedings Volume 2894, Detectors, Focal Plane Arrays, and Applications; (1996) https://doi.org/10.1117/12.252094
Event: Photonics China '96, 1996, Beijing, China

Abstract

8-element microbolometer detector arrays of high T_c superconducting films have been fabricated using both granular and epitaxial YBCO films deposited by electron beam evaporation with post annealing and laser ablation respectively. The devices were patterned by ion beam milling. The characteristics for optical response of the arrays were investigated in the region of 8 approximately 14 micrometers . A blackbody at the temperature of 500 K was used as a radiation source for sensitivity measurement. The microbolometer array was mounted in a temperature variable dewar. The operating temperature of the array was regulated at the center of the resistive transition edge using a temperature controller. The average noise equivalent power and the average normalized detectivity of the arrays were in the order of 10^-12 WHz^-1/2 and 10⁹ cmHz^1/2W^-1 respectively at the chopping frequency of 10 Hz. The frequency response of the arrays were also studied in our experiments.

Citation Download Citation

Zhihong Mai, Xinjian Yi, Xing-Rong Zhao, Fang Qiao Zhou, and Luqin Liu "High Tc superconducting microbolometer detector arrays", Proc. SPIE 2894, Detectors, Focal Plane Arrays, and Applications, (25 September 1996); https://doi.org/10.1117/12.252094

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