Analysis of a new piezoelectric multiple-beam-scanning method

Bing Ye; Yi Hu

doi:10.1117/12.253088

3 October 1996 Analysis of a new piezoelectric multiple-beam-scanning method

Bing Ye, Yi Hu

Proceedings Volume 2899, Automated Optical Inspection for Industry; (1996) https://doi.org/10.1117/12.253088
Event: Photonics China '96, 1996, Beijing, China

Abstract

In this paper, we introduce a new type of multi- piezoelectric 2D light scanner and analyze the scanner's principle, characteristics of construction and property.

Citation Download Citation

Bing Ye and Yi Hu "Analysis of a new piezoelectric multiple-beam-scanning method", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); https://doi.org/10.1117/12.253088

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