Paper
6 June 1997 Fabrication of LD-3 polymer directional couplers
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Abstract
LD-3 polymer directional couplers have the potential use as low-voltage modulators and switches. They can be integrated into module-to-module systems using currently available VLSI fabrication techniques. Modes of channel waveguides are calculated and coupling lengths are determined using BPM_CAD. We report the fabrication of LD-3 polymer directional couplers designed to operate at 1.3 micrometers .
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John Martin Taboada, Guohua Cao, Huajun Tang, Jeffery J. Maki, Suning Tang, and Ray T. Chen "Fabrication of LD-3 polymer directional couplers", Proc. SPIE 2994, Physics and Simulation of Optoelectronic Devices V, (6 June 1997); https://doi.org/10.1117/12.275584
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KEYWORDS
Directional couplers

Polymers

Channel waveguides

Nonlinear optics

Photomasks

Silicon

Waveguides

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