Comparison of models and measurements of scatter from surface-bound particles

Craig A. Scheer; John C. Stover; Vladimir I. Ivakhnenko

doi:10.1117/12.304395

1 April 1998 Comparison of models and measurements of scatter from surface-bound particles

Craig A. Scheer, John C. Stover, Vladimir I. Ivakhnenko

Proceedings Volume 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II; (1998) https://doi.org/10.1117/12.304395
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

The paper reviews techniques to calculate differential scattering cross-section of sub-micron surface bound particles from scatter measurement. It discusses both the multiple and single particle measurement approaches to obtaining scatter data and the associated problems with each method. Measured results are compared to a scatter model based on the discrete source method. For spherical particles the model has very close agreement with the measured scatter. For non-spherical particles the agreement is close only for particle diameters smaller than about one fifth wavelength.

Citation Download Citation

Craig A. Scheer, John C. Stover, and Vladimir I. Ivakhnenko "Comparison of models and measurements of scatter from surface-bound particles", Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); https://doi.org/10.1117/12.304395

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