Diagnostics of nitrogen-implanted diamond-like carbon films by optical and microhardness measurements

Victor V. Artamonov; Nickolai I. Klyui; B. N. Romanyuk; Mikhail Ya. Valakh; O. V. Vasylyk; Victor A. Semenovich; Alejandro Perez-Rodriguez; Juan Ramon Morante

doi:10.1117/12.306239

20 April 1998 Diagnostics of nitrogen-implanted diamond-like carbon films by optical and microhardness measurements

Victor V. Artamonov, Nickolai I. Klyui, B. N. Romanyuk, Mikhail Ya. Valakh, O. V. Vasylyk, Victor A. Semenovich, Alejandro Perez-Rodriguez, Juan Ramon Morante

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Proceedings Volume 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997; (1998) https://doi.org/10.1117/12.306239
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1997, Kiev, Ukraine

Abstract

Comparative study of nitrogen implanted a-C:H film has been carried out by micro-Raman and nanoindentation techniques. At high dose nitrogen implantation (1(DOT)10¹⁷ cm^-2) the structural inhomogeneities are observed in the implanted region. After implantation a significant broadening and energy shift of both G- and D-bands in Raman spectra are observed. On the other hand, film hardness measurements reveal the existence of more dramatic differences between both implanted regions with homogeneous and structural inhomogeneities. The film hardness in the inhomogeneous region more than by 5 times exceed the one in the homogeneous region. The hardness improvement of ion implanted a-C:H film is related to film disordering and ion beam induced phase-structure transformation in the implanted region.

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Victor V. Artamonov, Nickolai I. Klyui, B. N. Romanyuk, Mikhail Ya. Valakh, O. V. Vasylyk, Victor A. Semenovich, Alejandro Perez-Rodriguez, and Juan Ramon Morante "Diagnostics of nitrogen-implanted diamond-like carbon films by optical and microhardness measurements", Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); https://doi.org/10.1117/12.306239

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KEYWORDS

Nitrogen

Raman spectroscopy

Carbon

Ion beams

Ions

Ion implantation

Luminescence

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