New studies of reactive pulsed laser deposition

Ion N. Mihailescu; Eniko Gyorgy; Valentin S. Teodorescu; Gheorghe Marin; D. Pantelica; A. Andrei; Johny Neamtu

doi:10.1117/12.312749

2 July 1998 New studies of reactive pulsed laser deposition

Ion N. Mihailescu, Eniko Gyorgy, Valentin S. Teodorescu, Gheorghe Marin, D. Pantelica, A. Andrei, Johny Neamtu

Proceedings Volume 3405, ROMOPTO '97: Fifth Conference on Optics; (1998) https://doi.org/10.1117/12.312749
Event: ROMOPTO '97: Fifth Conference on Optics, 1997, Bucharest, Romania

Abstract

We report the synthesis and deposition of TiC films by reactive pulsed laser deposition. Ti targets have been submitted to multipulse UV laser action in low pressure CH₄. The thin films were grown on a collector placed parallel to the target. The films were characterized by electron microscopy, electron spectroscopy and nuclear techniques.

Citation Download Citation

Ion N. Mihailescu, Eniko Gyorgy, Valentin S. Teodorescu, Gheorghe Marin, D. Pantelica, A. Andrei, and Johny Neamtu "New studies of reactive pulsed laser deposition", Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); https://doi.org/10.1117/12.312749

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