Performance of MEMS-based gas distribution and control systems for semiconductor processing

Albert K. Henning; John Fitch; James M. Harris; Errol B. Arkilic; Brad A. Cozad; Ben Dehan

doi:10.1117/12.323883

8 September 1998 Performance of MEMS-based gas distribution and control systems for semiconductor processing

Albert K. Henning, John Fitch, James M. Harris, Errol B. Arkilic, Brad A. Cozad, Ben Dehan

Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323883
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

The advent of microelectromechanical systems has enabled dramatic changes in diverse technological areas. In terms of control and distribution of liquids and gases (microfluidics), MEMS-based devices offer opportunities to achieve increased performance, and higher levels of functional integration, at lower cost, with decreased size and increased reliability. This work focuses on recent research and development of high-purity gags distribution and control systems for semiconductor processing. These systems include the following components, based upon both normally-open and normally-closed microvalves: pressure- based mass flow controllers; vacuum leak-rate shut-off valves; and pressure regulators. Advanced packaging techniques enable these components to be integrated into gas sticks and panels which have small size, corrosion-resistant wetted materials, small dead volumes, and minimal particle generation. Principles of operation of components and panels, and performance data at both the component and system level, will be presented. The potential for 10X size reduction (linear dimension), 2X product yield improvement (through increased reliability, improved flow accuracy and repeatability, and contamination reduction), and 5X reduction in process gas consumption, will also be addressed. Particular emphasis on characterization and verification of flow measurements in mass flow controllers (versus NIST standards), and the flow models used in designing and characterizing these systems, will be made.

Citation Download Citation

Albert K. Henning, John Fitch, James M. Harris, Errol B. Arkilic, Brad A. Cozad, and Ben Dehan "Performance of MEMS-based gas distribution and control systems for semiconductor processing", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); https://doi.org/10.1117/12.323883

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available