Fiber optic sensor for measuring very small holes

Guijun Ji; Heinrich Iven Schwenke; Eugen Trapet

doi:10.1117/12.335740

11 January 1999 Fiber optic sensor for measuring very small holes

Guijun Ji, Heinrich Iven Schwenke, Eugen Trapet

Proceedings Volume 3538, Process Monitoring with Optical Fibers and Harsh Environment Sensors; (1999) https://doi.org/10.1117/12.335740
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States

Abstract

A fiber optic sensor for measuring the diameter and from errors of very small hole or blind hoe. with diameter down to 0.2 mm and depth to diameter ratio up to 20 was developed. Since optical non-contact methods are difficult to use for measuring the diameter and from errors of small hole at any cross section, a fiber optic sensor, which combines the advantages of optical non-contact method and mechanical contact one, was proposed. The principle is based on the evaluation of a central position of stylus ball by an optical system. Experiments show that the accuracy of the system is better than 1 micrometers and the measuring force is less than 10 (mu) N.

Citation Download Citation

Guijun Ji, Heinrich Iven Schwenke, and Eugen Trapet "Fiber optic sensor for measuring very small holes", Proc. SPIE 3538, Process Monitoring with Optical Fibers and Harsh Environment Sensors, (11 January 1999); https://doi.org/10.1117/12.335740

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