Application of gray-scale LDW-glass masks for fabrication of high-efficiency DOEs

Victor Pavlovich Korolkov; Anatoly I. Malyshev; Vladislav G. Nikitin; Alexander G. Poleshchuk; Andrey A. Kharissov; Vadim V. Cherkashin; Chuck Wu

doi:10.1117/12.349316

1 June 1999 Application of gray-scale LDW-glass masks for fabrication of high-efficiency DOEs

Victor Pavlovich Korolkov, Anatoly I. Malyshev, Vladislav G. Nikitin, Alexander G. Poleshchuk, Andrey A. Kharissov, Vadim V. Cherkashin, Chuck Wu

Author Affiliations +

Proceedings Volume 3633, Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI; (1999) https://doi.org/10.1117/12.349316
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

The perspective opportunity to fabricate gray-scale masks was given LDW-glasses (LDW--Laser Direct Writing) from Canyon Materials, Inc. LDW-glass blanks contain a large number density of coloring specks of silver in a surface glass layer. A focused laser beam is used to heat erase these coloring specks. Experiments on the influence of laser radiation on LDW-glasses was carried out using a circular laser writing system. The transmittance value from the blank of 0.1 - 5% up to 70 - 80% depending on laser beam power is obtained with the current write scheme. Results of research of LDW-glasses behavior in a wide range of laser beam scanning speeds are described. Laser pattern generation in LDW-glass including the spatial resolution is discussed. The technology of fabrication of continuous-phase diffractive elements was tested by making exemplary Fresnel lenses. Total 80% efficiency for quartz Fresnel lenses with minimal zone width of 8 micrometers was readily achieved in the preliminary experiments.

Citation Download Citation

Victor Pavlovich Korolkov, Anatoly I. Malyshev, Vladislav G. Nikitin, Alexander G. Poleshchuk, Andrey A. Kharissov, Vadim V. Cherkashin, and Chuck Wu "Application of gray-scale LDW-glass masks for fabrication of high-efficiency DOEs", Proc. SPIE 3633, Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI, (1 June 1999); https://doi.org/10.1117/12.349316

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available