Analysis of coupled diaphragms using coupled-mode theory

Ananth Selvarajan; Talabuttala Srinivas; S. K. Anand

doi:10.1117/12.354274

20 July 1999 Analysis of coupled diaphragms using coupled-mode theory

Ananth Selvarajan, Talabuttala Srinivas, S. K. Anand

Proceedings Volume 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS; (1999) https://doi.org/10.1117/12.354274
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States

Abstract

Diaphragm pressure sensors based on silicon micro-machining have advantages of small size and integrability with control electronics to form efficient MEMS applications. In this paper analysis of diaphragm based pressure sensors are presented by deriving the displacement function. Governing equations for individual diaphragms are given followed by analysis of a systems of two coupled diaphragms. Coupled mode theory is used to analyze the two diaphragm pressure sensor by expanding the combined mode fields in terms of individual modes of the single diaphragms. Results are presented for typical diaphragm parameters. Results indicate that coupled diaphragm sensors can be more efficient than single diaphragm sensors.

Citation Download Citation

Ananth Selvarajan, Talabuttala Srinivas, and S. K. Anand "Analysis of coupled diaphragms using coupled-mode theory", Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); https://doi.org/10.1117/12.354274

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