Specular spectroscopic scatterometry in DUV lithography

Xinhui Niu; Nickhil H. Jakatdar; Junwei Bao; Costas J. Spanos; Sanjay K. Yedur

doi:10.1117/12.350802

14 June 1999 Specular spectroscopic scatterometry in DUV lithography

Xinhui Niu, Nickhil H. Jakatdar, Junwei Bao, Costas J. Spanos, Sanjay K. Yedur

Proceedings Volume 3677, Metrology, Inspection, and Process Control for Microlithography XIII; (1999) https://doi.org/10.1117/12.350802
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

Scatterometry is a one of the few types of metrology that has true in-situ potential for deep submicron CD and profile analysis. To date, commercial prototypes have been used to establish scatterometry based on single wavelength, multiple incident angle inspection. We extend this idea by deploying specular spectroscopic scatterometry (SSS). Conventional scatterometry is designed to measure either many diffraction orders or variable incident/collection angle at a single wavelength. Specular spectroscopic scatterometry is designed to measure the 0th order diffraction responses at a fixed angle of incidence. Specular spectroscopic scatterometry can make direct use of the existing spectroscopic ellipsometry equipment. We show that SSS provides an accurate, inexpensive, and non-destructive CD metrology solution.

Citation Download Citation

Xinhui Niu, Nickhil H. Jakatdar, Junwei Bao, Costas J. Spanos, and Sanjay K. Yedur "Specular spectroscopic scatterometry in DUV lithography", Proc. SPIE 3677, Metrology, Inspection, and Process Control for Microlithography XIII, (14 June 1999); https://doi.org/10.1117/12.350802

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