MOEMS at LETI

Patrick Louis Mottier; Eric Ollier; Patrick Pouteau; Karine Petroz; Sylvie Jarjayes

doi:10.1117/12.341258

10 March 1999 Moems at Leti

Patrick Louis Mottier, Eric Ollier, Patrick Pouteau, Karine Petroz, Sylvie Jarjayes

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341258
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

We give a quick overview of MOEMS technologies under development at LETI. We mainly focus on recent developments in relation with the 'Europractice Competence Center Number 3' dedicated to MOEMS whose LETI is the coordinator. MOEMS are optical devices offering simultaneously optical and mechanical functions, and achieved in a collective manner by means of microelectronics like process and machines. Different devices and demonstrators already exist at LETI such as micro-switches for optical fiber networks, vibration sensors, scanning devices for laser or are under development such as tunable Fabry-Perot interferometers. Examples and performances are presented.

Citation Download Citation

Patrick Louis Mottier, Eric Ollier, Patrick Pouteau, Karine Petroz, and Sylvie Jarjayes "Moems at Leti", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341258

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