Microtechnology for fabrication of surface micromechanic devices based on a novel SiC-AlN composition

Victor V. Luchinin; Andrey V. Korlyakov; Givi I. Jandjgava; Stanislav V. Prosorov; Aleksander K. Solomatin; Anatoley V. Sorokin; Sergey G. Kucherkov; Leonid A. Severov; Valeriy K. Ponomarev

doi:10.1117/12.341156

10 March 1999 Microtechnology for fabrication of surface micromechanic devices based on a novel SiC-AlN composition

Victor V. Luchinin, Andrey V. Korlyakov, Givi I. Jandjgava, Stanislav V. Prosorov, Aleksander K. Solomatin, Anatoley V. Sorokin, Sergey G. Kucherkov, Leonid A. Severov, Valeriy K. Ponomarev

Author Affiliations +

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341156
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

Selection of candidate materials and processes for manufacturing structural members is of great moment in designing surface micromechanics devices. The known arts of obtaining superficial microstructures, as a rule, with the use of a 'sacrificial' layer were based on the employment of polysilicon as a working material and of silicon dioxide as a removable 'sacrificial' underlayer. This paper proposed an art for obtaining a novel structure forming the basis for surface micromechanics. Thereby monocrystalline silicon carbide is to be epitaxially grown over a compound substrate, such as AlN-Si, AlN-Al₂O₃ or AlN-SiC. A film of aluminium nitride serves then as an orientation base for epitaxially-grown silicon carbide and also as a 'sacrificial' layer to be stripped away by an etchant which must be non-reactive both to SiC and to substrate material. The crystallochemical computability of SiC and AlN, their matching thermal expansion coefficients, and high mechanical properties of silicon carbide favor a stress decrease in movable loaded members of surface micromechanics devices, just increasing those performance stability. The paper will present some experimental results that have been obtained in designing a process for manufacturing a rotating wheel vibratory microgyroscope with a moveable SiC pendulum using a SiC-AlN composition as the base.

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Victor V. Luchinin, Andrey V. Korlyakov, Givi I. Jandjgava, Stanislav V. Prosorov, Aleksander K. Solomatin, Anatoley V. Sorokin, Sergey G. Kucherkov, Leonid A. Severov, and Valeriy K. Ponomarev "Microtechnology for fabrication of surface micromechanic devices based on a novel SiC-AlN composition", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341156

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