Application of magnetron-sputtering-obtained Ce-Zr-O2-x-oxide thin layers to gas detection

Jan Ziaja; Wlodzimierz Mista

doi:10.1117/12.346842

30 April 1999 Application of magnetron-sputtering-obtained Ce-Zr-O2-x-oxide thin layers to gas detection

Jan Ziaja, Wlodzimierz Mista

Proceedings Volume 3730, Optoelectronic and Electronic Sensors III; (1999) https://doi.org/10.1117/12.346842
Event: Optoelectronic and Electronic Sensors III, 1998, Jurata, Poland

Abstract

Thin layers of Ce-Zr-O_2-x with varied chemical and phase composition were deposited by magnetron sputtering with pulse power supply system. The phase transition in the function of temperature and additionally during hydrogen treatment were studied. The variation of resistivity of such layers was found during changing of the gas atmosphere. By comparison, the properties of thin films prepared by sol-gel method were also studied.

Citation Download Citation

Jan Ziaja and Wlodzimierz Mista "Application of magnetron-sputtering-obtained Ce-Zr-O2-x-oxide thin layers to gas detection", Proc. SPIE 3730, Optoelectronic and Electronic Sensors III, (30 April 1999); https://doi.org/10.1117/12.346842

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