Metrology of precision optical surfaces and laser mirrors: I

Valentina V. Azarova; Igor Dronov; Aleksandr Karcev; Vlad Sharov; Konstantin Malickiy

doi:10.1117/12.360169

6 September 1999 Metrology of precision optical surfaces and laser mirrors: I

Valentina V. Azarova, Igor Dronov, Aleksandr Karcev, Vlad Sharov, Konstantin Malickiy

Proceedings Volume 3739, Optical Fabrication and Testing; (1999) https://doi.org/10.1117/12.360169
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

The comparison of different methods of measuring surface roughness parameters, i.e. angle-resolved scattering (ARS) technique and atomic force microscope (AFM) profilometry, was performed for quartz precise optical surfaces, obtained by different polishing processes. The functions of power spectral density, calculated form ARS, using vector scattering theory, and form AFM data are in good agreement in the range of polar scatter angles 30..75 degrees. In this range the angular scattering is well predicted using the exponential autocorrelation function with parameters, calculated from surface profile. The autocorrelation length, calculated from ARS data in above range using exponential statistics, remains practically constant for different surfaces, obtained by the same polishing process. The latter allows to consider it as the characteristic parameter of certain polishing process.

Citation Download Citation

Valentina V. Azarova, Igor Dronov, Aleksandr Karcev, Vlad Sharov, and Konstantin Malickiy "Metrology of precision optical surfaces and laser mirrors: I", Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); https://doi.org/10.1117/12.360169

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available