Common-path multichannel heterodyne laser interferometer for subnanometer surface metrology

Feng Zhao; Jennifer E. Logan; Stuart B. Shaklan; Michael Shao

doi:10.1117/12.347766

7 May 1999 Common-path multichannel heterodyne laser interferometer for subnanometer surface metrology

Feng Zhao, Jennifer E. Logan, Stuart B. Shaklan, Michael Shao

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347766
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

A multi-channel heterodyne laser interferometer is proposed for measurement of optical surface deformations at the sub- nanometer level. This interferometer employs a common-path configuration and heterodyne detection, by which fringe errors due to laser frequency fluctuations and optical path variations due to vibration can be reduced. By measuring the heterodyne signal phase among sub-apertures (pixels) with a 2- D detector array, the surface height can be reconstructed and surface deformation can be measured by comparing consecutive measurements. Detection of sub-nanometer level surface deformation is achieved using high precision digital phase meters and athermalized opto-mechanical systems. This paper describes the interferometer design criteria and experiment methodologies.

Citation Download Citation

Feng Zhao, Jennifer E. Logan, Stuart B. Shaklan, and Michael Shao "Common-path multichannel heterodyne laser interferometer for subnanometer surface metrology", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347766

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