Application of fiber optic sensors in waste water management from microelectronics fabrication processes

Dumitru Gh. Ulieru

doi:10.1117/12.364191

16 September 1999 Application of fiber optic sensors in waste water management from microelectronics fabrication processes

Dumitru Gh. Ulieru

Author Affiliations +

Proceedings Volume 3821, Environmental Sensing and Applications; (1999) https://doi.org/10.1117/12.364191
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany

Abstract

The concept of waste water treatment from microelectronics fab processes is referring to waste water discharged from ultrapure water plant which can't be treated on recovery waste water section. These wastes concentrated contains organic and inorganic acids, alkalis, metals, cyanide, chromium and fluoride effluent from fab processes. They will be canalized on qualities for treatment sections which permit the discharge of treated waste water as neutral with solids removal as compacted sludge. For management of waste water treatment plant we are using the fiber optic sensors as follows: level and flow control, signalization automatic pumps control and protection, solid control, leak detection a.s.o. The neutral quality of treated water has 'null' impact against of environmental system recommended for all semiconductors and microelectronics fab processes.

Citation Download Citation

Dumitru Gh. Ulieru "Application of fiber optic sensors in waste water management from microelectronics fabrication processes", Proc. SPIE 3821, Environmental Sensing and Applications, (16 September 1999); https://doi.org/10.1117/12.364191

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