Aeroloader: an overhead transport system for semiconductor automation

Gerald Friedman Sr.

doi:10.1117/12.371175

24 November 1999 Aeroloader: an overhead transport system for semiconductor automation

Gerald Friedman Sr.

Proceedings Volume 3832, Sensors and Controls for Intelligent Machining and Manufacturing Mechatronics; (1999) https://doi.org/10.1117/12.371175
Event: Photonics East '99, 1999, Boston, MA, United States

Abstract

Automation of semiconductor manufacturing is a very large segment of the automation industry. The automation ranges from machinery capable of handling a single semiconductor wafer to automated material handling system that transport large numbers of these wafers at one time.

Citation Download Citation

Gerald Friedman Sr. "Aeroloader: an overhead transport system for semiconductor automation", Proc. SPIE 3832, Sensors and Controls for Intelligent Machining and Manufacturing Mechatronics, (24 November 1999); https://doi.org/10.1117/12.371175

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