Micromachined flow-handling components: micropumps

Olaf Soerensen; Klaus S. Drese; Wolfgang Ehrfeld; Hans-Joachim Hartmann

doi:10.1117/12.370294

18 November 1999 Micromachined flow-handling components: micropumps

Olaf Soerensen, Klaus S. Drese, Wolfgang Ehrfeld, Hans-Joachim Hartmann

Proceedings Volume 3857, Chemical Microsensors and Applications II; (1999) https://doi.org/10.1117/12.370294
Event: Photonics East '99, 1999, Boston, MA, United States

Abstract

Microfluidic components, especially micropumps, are essential for miniaturized dosing systems, Micro Total Analysis Systems and miniaturized labs for medical diagnosis. A variety of micropumps for these different applications have been developed at the Institut fuer Mikrotechnik Mainz GmbH.

Citation Download Citation

Olaf Soerensen, Klaus S. Drese, Wolfgang Ehrfeld, and Hans-Joachim Hartmann "Micromachined flow-handling components: micropumps", Proc. SPIE 3857, Chemical Microsensors and Applications II, (18 November 1999); https://doi.org/10.1117/12.370294

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