Drop-by-drop deposition of ceramic slurry for fabrication of PZT microstructures

Lena Klintberg; Greger Thornell; Stefan A. I. Johansson

doi:10.1117/12.364479

1 October 1999 Drop-by-drop deposition of ceramic slurry for fabrication of PZT microstructures

Lena Klintberg, Greger Thornell, Stefan A. I. Johansson

Proceedings Volume 3892, Device and Process Technologies for MEMS and Microelectronics; (1999) https://doi.org/10.1117/12.364479
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

Most of the techniques available for ceramic microprocessing, e.g. tape casting, sputtering and sol-gel processing suffer from lack of geometrical flexibility although they often allow for good thickness control. With the interest for ceramic material in MST, especially the piezoelectric lead zirconate titanate, often involving more complex geometries, development of complementary technologies seems motivated.

Citation Download Citation

Lena Klintberg, Greger Thornell, and Stefan A. I. Johansson "Drop-by-drop deposition of ceramic slurry for fabrication of PZT microstructures", Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); https://doi.org/10.1117/12.364479

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