Aligned In0.5Ga0.5As quantum dots on laser-patterned GaAs substrate

SeKi Park; C. K. Hyon; Byung Don Min; Hyo Jin Kim; Sung Min Hwang; Eun Kyu Kim; Hong Kyu Lee; Cheon Lee; Yong-Gi Kim

doi:10.1117/12.369430

9 November 1999 Aligned In_0.5Ga_0.5As quantum dots on laser-patterned GaAs substrate

SeKi Park, C. K. Hyon, Byung Don Min, Hyo Jin Kim, Sung Min Hwang, Eun Kyu Kim, Hong Kyu Lee, Cheon Lee, Yong-Gi Kim

Proceedings Volume 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures; (1999) https://doi.org/10.1117/12.369430
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

It has been studied the selective InGaAs quantum dots growth on laser-patterned GaAs substrate by atmospheric pressure metal organic chemical vapor deposition. We have patterned the samples below etching threshold power density 8.84 MW/cm² by argon ion laser. The depth and lateral size of the pattern are about 8 nm and 100 nm, respectively. The QDs were grown on AlGaAs matrix.

Citation Download Citation

SeKi Park, C. K. Hyon, Byung Don Min, Hyo Jin Kim, Sung Min Hwang, Eun Kyu Kim, Hong Kyu Lee, Cheon Lee, and Yong-Gi Kim "Aligned In_0.5Ga_0.5As quantum dots on laser-patterned GaAs substrate", Proc. SPIE 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures, (9 November 1999); https://doi.org/10.1117/12.369430

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available