Plane wave quantity and its measurement of plate working surface

Jun-Qi Liu; Yanan Liu; Linxiang Cao; XiaoMing Zhao

doi:10.1117/12.369440

9 November 1999 Plane wave quantity and its measurement of plate working surface

Jun-Qi Liu, Yanan Liu, Linxiang Cao, XiaoMing Zhao

Proceedings Volume 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures; (1999) https://doi.org/10.1117/12.369440
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

This paper deals with the assay requirements and the method of plane. Wave quantity of the plate working surface according to the National Standards of 'cast iron plate' and 'rock plate', derives in detail, the detecting principle of plane wave detector and gives out the relationship between the partial plane error and the partial defect of the plate and the plane wave quantity. It also inquires into the relationship between the contact spot and 200 mm straight line wave and plane wave quantity.

Citation Download Citation

Jun-Qi Liu, Yanan Liu, Linxiang Cao, and XiaoMing Zhao "Plane wave quantity and its measurement of plate working surface", Proc. SPIE 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures, (9 November 1999); https://doi.org/10.1117/12.369440

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