Paper
18 August 2000 MEMS/MOEMS for lightwave networks: Can little machines make it big?
David J. Bishop, Vladimir A. Aksyuk, Cristian A. Bolle, C. Randy Giles, Flavio Pardo, James A. Walker
Author Affiliations +
Proceedings Volume 4177, Microfluidic Devices and Systems III; (2000) https://doi.org/10.1117/12.395656
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
Silicon micromechanics in an emerging field which is beginning to impact almost every area of science and technology. In areas as diverse as the chemical, automotive, aeronautical, cellular and optical communication industries, Silicon micromachines are becoming the solution of choice for many problems. In this paper we will describe what they are, how they are built, and show how they have the potential to revolutionize lightwave systems. Devices such as optical switches, variable attenuators, active equalizers, add/drop multiplexers, optical crossconnects, gain tilt equalizers, data transmitters and many others are beginning to find ubiquitous application in advanced lightwave systems. We will show examples of these devices and describe some of the challenges in attacking the billions of dollars in addressable markets for this technology.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David J. Bishop, Vladimir A. Aksyuk, Cristian A. Bolle, C. Randy Giles, Flavio Pardo, and James A. Walker "MEMS/MOEMS for lightwave networks: Can little machines make it big?", Proc. SPIE 4177, Microfluidic Devices and Systems III, (18 August 2000); https://doi.org/10.1117/12.395656
Lens.org Logo
CITATIONS
Cited by 7 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Silicon

Active optics

Attenuators

Industrial chemicals

Microfluidics

Multiplexers

Optical communications

RELATED CONTENT

Silicon photonic-wire waveguide devices
Proceedings of SPIE (February 09 2007)
Microreactor for efficient catalyst evaluation
Proceedings of SPIE (September 28 2001)

Back to Top