Miniature high-resolution imaging system with 3D MOEMS beam scanning for Mars exploration

David L. Dickensheets; Phillip A. Himmer; Robert A. Friholm; B. Jeffrey Lutzenberger

doi:10.1117/12.396518

22 August 2000 Miniature high-resolution imaging system with 3D MOEMS beam scanning for Mars exploration

David L. Dickensheets, Phillip A. Himmer, Robert A. Friholm, B. Jeffrey Lutzenberger

Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396518
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

A compact confocal imaging instrument is described that makes use of a high-performance bi-axial Silicon torsion mirror, in concert with a reflective dynamic parabolic membrane mirror to provide 3D beam scanning. This beam scan engine is incorporated into a confocal imaging Raman spectrometer under development for exploration of Martian rocks and soil, designed to achieve optical resolution of 1 micrometers at (lambda) equals 850 nm, with a field of view of 300 micrometers and focus control of more than 200 micrometers . Fast x-y beam scanning is achieved with the bi-axial scanner, while the parabolic membrane provides both static and dynamic focus control for gross instrument focus as well as on-the fly field curvature correction or substrate contour tracing. In this paper we describe the MOEM elements as well as on-the-fly curvature correction or substrate contour tracing. In this paper we describe the MOEM elements as well as the overall instrument architecture. We also present initial imaging results using the torsion mirror scanner, and we describe the dynamic focus element fabrication, modeling and preliminary experimental characterization.

Citation Download Citation

David L. Dickensheets, Phillip A. Himmer, Robert A. Friholm, and B. Jeffrey Lutzenberger "Miniature high-resolution imaging system with 3D MOEMS beam scanning for Mars exploration", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396518

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available