Hot electron emission from insulators under electron-beam processing

Anatoly M. Filachev; Boris I. Fouks; Dmitrii E. Greenfield

doi:10.1117/12.394148

2 August 2000 Hot electron emission from insulators under electron-beam processing

Anatoly M. Filachev, Boris I. Fouks, Dmitrii E. Greenfield

Proceedings Volume 4187, Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics; (2000) https://doi.org/10.1117/12.394148
Event: Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics, 1999, Moscow, Russian Federation

Abstract

The experimental study of charge relaxation while electron beam processing of dielectrics has shown that under irradiation with an intensive and concentrated electron beam some dielectrics reveal strange behavior. The electron emission from their surface much exceeds the value expected frmo the conventional theory of the secondary electron emission. Moreover, the time dependence of the emission is quite different. The measured current changes rapidly with time and, under some circumstances, oscillates while the secondary emission is always proportional to the electron beam's current. The target of the present paper is to construct the physical model of this effect employing the theory of hot electrons.

Citation Download Citation

Anatoly M. Filachev, Boris I. Fouks, and Dmitrii E. Greenfield "Hot electron emission from insulators under electron-beam processing", Proc. SPIE 4187, Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics, (2 August 2000); https://doi.org/10.1117/12.394148

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