Paper
6 October 2000 Effects of brittle single-crystal material anisotropy on diamond-turned surface quality
Qingliang Zhao, Shen Dong, Yi Zhao
Author Affiliations +
Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402805
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China
Abstract
Based on the anisotropy of granular structure, the reasonable criterion was given to understand the generation of the prior cleavage or slip for each cleavage system or slip system. The phenomenon that the roughness of the diamond turned single crystal materials's surface distributes in scallop is explained, and a turning method is presented to eliminate the scallop distribution. Beside this, the AFM was used to observe the micro-topography of the light and shade area of brittle single crystal material's diamond turned surface. The criterion is in good agreement with the observed results.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qingliang Zhao, Shen Dong, and Yi Zhao "Effects of brittle single-crystal material anisotropy on diamond-turned surface quality", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); https://doi.org/10.1117/12.402805
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KEYWORDS
Crystals

Germanium

Silicon

Atomic force microscopy

Diamond

Anisotropy

Diamond machining

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